Failure Analysis of Samples
Test Items
Layer Removal, Cross-Section Preparation, and Layered Structural Analysis, Material delayering, Cross-sectional sample preparation, Analysis of metal interconnects and dielectric layers.
Test Scope
Technical Parameters: Detector effective area: 65 mm²
Element detection range: Be (Z=4) to Cf (Z=98)
Test Standards
SH-C-24-03-0016, etc.
