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Focused Ion Beam Circuit Edit

Microstructural Characterization

Crystallographic Analysis

Elemental Analysis

Spectroscopic Energy Analyzer

Failure Analysis of Samples

Microstructural Characterization

结构观察.jpg

Test Items

Microstructural Morphology Analysis, Dimensional Measurement.

Technical Parameters

Accelerating voltage: 200 kV

Information resolution: 0.12 nm (TEM)

Electron source: Field Emission Gun (FEG)

STEM detectors: Bright Field (BF), Dark Field (DF), High-Angle Annular Dark Field (HAADF)

HAADF image resolution: 0.16 nm (STEM)

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