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Focused Ion Beam Circuit Edit

Microstructural Characterization

Crystallographic Analysis

Elemental Analysis

Spectroscopic Energy Analyzer

Failure Analysis of Samples

Crystallographic Analysis

晶体学分析.jpg

Test Items

High-Resolution Imaging, Electron diffraction pattern analysis, Dislocation and lattice defect analysis.

Technical Parameters

Accelerating voltage: 200 kV

Information resolution: 0.12 nm (TEM)

Electron source: Field Emission Gun (FEG)

STEM detectors: BF / DF / HAADF

HAADF image resolution: 0.16 nm (STEM)

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