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Focused Ion Beam Circuit Edit

Microstructural Characterization

Crystallographic Analysis

Elemental Analysis

Spectroscopic Energy Analyzer

Failure Analysis of Samples

Elemental Analysis

成分分析.jpg

Test Items

Elemental Analysis, Contaminant Identification.

Technical Parameters

EDS System: Super-X Energy Dispersive Spectroscopy

Detector: Four Silicon Drift Detectors, A solid angle of 0.9 srad

CCD resolution: 4K × 4K

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